Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2006-11-21
2006-11-21
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S213000, C700S214000, C414S217000, C414S935000, C414S936000, C414S939000
Reexamination Certificate
active
07139638
ABSTRACT:
A thermal processing unit is connected to a substrate position detector, which is in turn connected to a bake unit controller. The thermal processing unit includes a temperature control plate and a lifting device. The temperature control plate and lifting device are connected to the bake unit controller. The operations of the temperature control plate and lifting device are controlled by the bake unit controller. A pressure measuring pipe is provided at a lower part of at least one of a plurality of pin inserting holes in the temperature control plate. The pressure measuring pipe is connected to a low differential pressure sensor. The low differential pressure sensor detects the pressure in an airflow exhausted from a space surrounded by a substrate and an upper face of the temperature control plate via the pressure measuring pipe.
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Fukumoto Yasuhiro
Masuda Mitsuhiro
Nakajima Toshihiro
Shiba Yasuhiro
Dainippon Screen Mfg. Co,. Ltd.
Ostrolenk Faber Gerb & Soffen, LLP
Tran Khoi H.
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