Substrate processing unit and substrate processing apparatus

Details Substrate processing unit and substrate processing apparatus Substrate processing unit and substrate processing apparatus

2008-05-06

2008-05-06

Tadesse, Yewebdar (Department: 1792)

Coating apparatus

Projection or spray type

With hood or offtake for waste material

C118S313000, C118S501000, C118S423000, C118S429000, C134S199000, C134S200000, C134S094100, C134S148000

Reexamination Certificate

active

11115214

ABSTRACT:
A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing section; and a cell cover, capable of closing a top opening of the cell, having a plurality of spray nozzles for separately spraying at least two types of processing liquids, wherein the pan and the cell each have an individual liquid discharge line.

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