Cleaning and liquid contact with solids – Apparatus – With means for collecting escaping material
Reexamination Certificate
2005-03-25
2010-11-23
Stinson, Frankie L (Department: 1711)
Cleaning and liquid contact with solids
Apparatus
With means for collecting escaping material
C134S902000
Reexamination Certificate
active
07836900
ABSTRACT:
A substrate processing system1comprises: a processing tank3for processing substrates W with a processing liquid; a drying unit6disposed above the processing tank3; and a carrying mechanism8for carrying the substrates W between the processing tank3and the drying unit6. A processing gas supply line21for supplying a processing gas into the drying unit6and inert gas supply lines24and25for supplying an inert gas into the drying unit6are connected to the drying unit6. A first discharge line for discharging an atmosphere purged from the drying unit6and a second discharge line27for forcibly exhausting the drying unit6are connected to the drying unit6.
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European Patent Office 1 641 027 Mar. 2006.
Office Action mailed Aug. 7, 2009, for JP Application No. 2006-512023, with English Translation, four pages.
Shindo Naoki
Toshima Takayuki
Tsurusaki Kotaro
Yano Hiroshi
Morrison & Foerster / LLP
Stinson Frankie L
Tokyo Electron Limited
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