Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-05-16
2006-05-16
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S108000
Reexamination Certificate
active
07047100
ABSTRACT:
A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.
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Untranslated Office Action issued by the Japanese Patent Office on Apr. 13, 2004 in connection with corresponding Japanese application No. 2001-205111.
Untranslated Office Action issued by the Korean Patent Office on Nov. 30, 2004 in connection with corresponding Korean application No. 10-2004-0077334.
Translation of Korean Patent Office's assertion regarding the relevancy of untranslated Korean application No. 2000-0047269.
Untranslated Office Action issued by the Korean Patent Office on Nov. 30, 2004 in connection with corresponding Korean application No. 10-2004-0077335.
Translation of Korean Patent Office's assertion regarding the relevancy of untranslated Korean application No. 1999-54594.
Translation of Korean Patent Office's assertion regarding the relevancy of untranslated Korean application No. 0211937.
Untranslated Office Action issued by the Korean Patent Office on Mar. 18, 2005 in connection with corresponding Korean application No. 10-2002-0035878.
Translation of Korean Patent Office's assertion regarding the relevancy of untranslated Korean application No. 1999-54594.
Untranslated Office Action issued by the Japanese Patent Office on Mar. 29, 2005 in connection with corresponding Japanese application No. 2001-205111.
English translation of relevant portions of Japanese Patent Office Action issued Mar. 29, 2005 submitted in lieu of statement of relevancy of prior art teachings to the instant application.
Untranslated Office Action issued by the Korean Patent Office on Oct. 13, 2005 in connection with corresponding Korean application No. 10-2004-0077334.
Hamada Tetsuya
Inoue Hidekazu
Kamei Kenji
Kitamoto Toru
Dainippon Screen Mfg. Co,. Ltd.
Garland Steven R.
Ostrolenk Faber Gerb & Soffen, LLP
Picard Leo
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