Substrate processing system having improved substrate...

Details Substrate processing system having improved substrate... Substrate processing system having improved substrate...

2007-08-30

2010-10-05

Adams, Gregory W (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

Reexamination Certificate

active

07806641

ABSTRACT:
A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, first rollers in the process chamber; and second rollers in the first load lock, wherein the first rollers and the second rollers are configured to transport a substrate thereon through the first opening between the first load lock and the process chamber. The first rollers and the second rollers are not rotated by an active transport mechanism.

REFERENCES:
patent: 6818108 (2004-11-01), Schertler
patent: 2005/0058776 (2005-03-01), Parent
patent: 2006/0177288 (2006-08-01), Parker et al.
patent: 2006/0251814 (2006-11-01), Parent
patent: 2006/0283391 (2006-12-01), Parent

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