Substrate processing system for setting uniform module cycle...

Details Substrate processing system for setting uniform module cycle... Substrate processing system for setting uniform module cycle...

2005-12-15

2009-12-08

Jarrett, Ryan A (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S112000, C700S121000

Reexamination Certificate

active

07630785

ABSTRACT:
In a substrate processing system according to the present invention, module cycle periods at a plurality of process modules PM1through PM4connected around a transfer module TM having installed therein a vacuum pressure-side transfer robot RB1, each representing the sum of a wafer stay time including the wafer processing time and an attendant busy time during which the wafer is transferred before and after the wafer stay time, are all set to a uniform length. The vacuum pressure-side transfer robot RB1takes out a processed wafer Wiand carries a next wafer Wi+1to be processed next by executing a pick and place operation for each of the process modules PM1through PM4during a single access to the process module.

REFERENCES:
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patent: 6714832 (2004-03-01), Nishihata et al.
patent: 2002/0076306 (2002-06-01), Tateyama et al.
patent: 4-113612 (1992-04-01), None
patent: 5-3174 (1993-01-01), None
patent: 2000-127069 (2000-05-01), None
patent: 2000-150619 (2000-05-01), None

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