Substrate processing system and substrate transfer method

Details Substrate processing system and substrate transfer method Substrate processing system and substrate transfer method

2008-10-14

2011-12-20

Keenan, James (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

Transporting means carries load to at least one of a...

C414S222020, C414S222070, C414S226050, C414S416020, C414S806000, C414S811000, C414S937000, C700S219000, C700S228000

Reexamination Certificate

active

08079797

ABSTRACT:
A substrate processing system includes a control section configured to control a series of transfer operations and preset to control operation of a container transfer apparatus, operation at a substrate access area, and operation of a substrate handling apparatus independently of each other. The control section includes a schedule creating portion configured to create a transfer schedule by individually adjusting operation timing of the container transfer apparatus, operation timing at the substrate access area, and operation timing of the substrate handling apparatus such that, in a state while a first lot of substrates are treated in the processing system, but the container transfer apparatus and the substrate access area are unoccupied, a container with a second lot of unprocessed substrates stored therein is transferred onto the substrate access area, thereby minimizing total transfer time.

REFERENCES:
patent: 5668733 (1997-09-01), Morimoto et al.
patent: 5700127 (1997-12-01), Harada et al.
patent: 5980591 (1999-11-01), Akimoto et al.
patent: 6275744 (2001-08-01), Yoshida
patent: 6507770 (2003-01-01), Tateyama et al.
patent: 6511315 (2003-01-01), Hashimoto
patent: 6584369 (2003-06-01), Patel et al.
patent: 6711454 (2004-03-01), Joma et al.
patent: 6889108 (2005-05-01), Tanaka et al.
patent: 6920369 (2005-07-01), Ueno et al.
patent: 7062344 (2006-06-01), Yokoyama et al.
patent: 7313452 (2007-12-01), Kobayashi et al.
patent: 7462011 (2008-12-01), Yamazaki et al.
patent: 2008/0019809 (2008-01-01), Takano
patent: 2011/0029122 (2011-02-01), Kaneko et al.
patent: 2002-64075 (2002-02-01), None

Affiliated with

Also associated with

Rating

Substrate processing system and substrate transfer method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate processing system and substrate transfer method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing system and substrate transfer method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4266683