Substrate processing system, and method of control therefor,...

Details Substrate processing system, and method of control therefor,... Substrate processing system, and method of control therefor,...

2004-03-26

2010-06-01

Crawford, Gene (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S121000, C700S214000

Reexamination Certificate

active

07729798

ABSTRACT:
A transfer schedule SA and a transfer schedule SB for an A lot and a B lot different from each other are generated on a transfer control table, the succeeding transfer schedule SB is moved ahead in the direction of a time axis within a range over which it does not interfere with the transfer schedule SA for the preceding A lot to make the start timing for the succeeding transfer schedule SB become earlier than the end timing for the transfer schedule for the preceding A lot, so that the transfer schedule SA and the transfer schedule SB are executed in parallel, thereby improving the throughput a wafer transfer process.

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Notification of Transmittal of Translation of the International Preliminary Report on Patentability (Form PCT/IB/338)—PCT/JP2004/004383, dated Jan. 2004.
PCT International Preliminary Report on Patentability (Form PCT/IB/409)—PCT/JP2004/004383, dated Jan. 2004.

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