Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Reexamination Certificate
2008-12-17
2011-10-11
Tadesse, Yewebdar (Department: 1717)
Coating apparatus
Control means responsive to a randomly occurring sensed...
Responsive to condition of coating material
C118S684000, C118S052000, C118S612000, C118S326000, C118S712000
Reexamination Certificate
active
08033244
ABSTRACT:
Leakage of an atmosphere of a solvent vapor used by a smoothing process for smoothing the surface of a resist pattern outside from a smoothing unit is prevented to facilitate incorporating the smoothing unit into a coating and developing system. A substrate processing system has a coating and developing block20, a smoothing block50, an airflow producing unit60for producing down airflow that flows down from above the coating and developing block20and the smoothing block50, and a main controller100for controlling the airflow producing unit60. The main controller100controls a flow regulating valve64aplaced in an air passage63aconnecting the airflow producing unit60to the coating and developing block20and a flow regulating valve64bplaced in an air passage63bconnecting the airflow producing unit60to the smoothing block50on the basis of a signal provided by a pressure sensor65afor measuring the pressure in the coating and developing block20and a signal provided by a pressure sensor65bfor measuring the pressure in the smoothing block50such that the pressure in the smoothing block50is lower than that in the coating and developing block20.
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Ishida Seiki
Minamida Junya
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tadesse Yewebdar
Tokyo Electron Limited
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