Metal working – Barrier layer or semiconductor device making
Patent
1997-09-11
1999-08-24
Graybill, David
Metal working
Barrier layer or semiconductor device making
414217, B05D 312, B05C 1300
Patent
active
059420138
ABSTRACT:
A substrate processing system comprises a cassette mounting section having a plurality of cassettes arranged therein, a sub-arm mechanism for transferring the substrate into and out of the cassette within the cassette mounting section, a first transfer path of the sub-arm mechanism extending along the arrangement of the cassettes in the cassette mounting section, a process section including a heat treating section for heating or cooling the substrate and a liquid treating section in which a process liquid is applied to the substrate, a main arm mechanism for transfer of the substrate from and onto the sub-arm mechanism and from and into the process section, and a second transfer path of the main arm mechanism. The heat treating section is positioned higher than the first transfer path, interposed between the cassette mounting section and the second transfer path in respect of a horizontal plane, and comprises a plurality of compartments stacked one upon the other.
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Graybill David
Tokyo Electron Limited
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