Data processing: generic control systems or specific application – Generic control system – apparatus or process – Sequential or selective
Reexamination Certificate
2007-06-29
2011-12-20
Hartman, Jr., Ronald (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Sequential or selective
C700S083000, C700S121000, C715S700000, C715S866000
Reexamination Certificate
active
08082045
ABSTRACT:
A method to graphically create a recipe for processing a substrate includes displaying graphical images that present processing operations to be performed on the substrate, allowing a user to set properties of the processing operations by manipulating the graphical images, and generating the recipe based on the properties of the processing operations set by the user and synchronizing the plurality of processing operations based on the properties. The graphical images may be time-bars in a Gantt-like chart that allows the user to see the sequence, the timing, and the durations of the processing operations.
REFERENCES:
patent: 5576946 (1996-11-01), Bender et al.
patent: 6031990 (2000-02-01), Sivakumar et al.
patent: 6629003 (2003-09-01), Frizzell et al.
patent: 6665575 (2003-12-01), Betawar et al.
patent: 6727096 (2004-04-01), Wang et al.
patent: 6775583 (2004-08-01), Slodowski et al.
patent: 6983233 (2006-01-01), Falcioni et al.
patent: 6984198 (2006-01-01), Krishnamurthy et al.
patent: 6996550 (2006-02-01), Wang et al.
patent: 7155361 (2006-12-01), Huang
patent: 7237160 (2007-06-01), Lu et al.
patent: 7292906 (2007-11-01), Funk et al.
patent: 7369913 (2008-05-01), Heminway et al.
patent: 7793292 (2010-09-01), Worek et al.
patent: 7894918 (2011-02-01), Kanodia et al.
patent: 2009/0164933 (2009-06-01), Pederson et al.
Erichsen, Thomas et al., Combinatorial microelectrochemistry: Development and evaluation of an electrochemical robotic system, Review of Scientific Instruments 76, 062204 (2005).
Ashizawa Yoshiki
Ngatchou Patrick
Pal Heng-Cheng
Schmidt John
Weiner Kurt
Hartman, Jr. Ronald
Intermolecular, Inc.
LandOfFree
Substrate processing recipe manager does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Substrate processing recipe manager, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing recipe manager will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4253729