Substrate processing method, computer-readable storage...

Details Substrate processing method, computer-readable storage... Substrate processing method, computer-readable storage...

2011-06-28

2011-06-28

Young, Christopher G (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

C430S313000, C430S323000, C430S330000

Reexamination Certificate

active

07968260

ABSTRACT:
The present invention has: a first step of measuring, as an initial condition of a substrate, any of a film thickness of a processing film on the substrate, a refractive index of the processing film, an absorption coefficient of the processing film, and a warpage amount of the substrate; a second step of estimating a dimension of a pattern of the processing film after predetermined processing from a previously obtained first relation between the initial condition and the dimension of the pattern of the processing film based on a measurement result of the initial condition; a third step of obtaining a correction value for a processing condition of the predetermined processing from a previously obtained second relation between the processing condition of the predetermined processing and the dimension of the pattern of the processing film based on an estimation result of the dimension of the pattern; a fourth step of correcting the processing condition of the predetermined processing based on the correction value; and a fifth step of performing predetermined processing on the substrate under the corrected processing condition to form the predetermined pattern in the processing film on the substrate.

REFERENCES:
patent: 2001-143850 (2001-05-01), None
patent: 2004-207703 (2004-07-01), None
patent: 2006-222354 (2006-08-01), None
patent: 2006-228816 (2006-08-01), None

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