Substrate processing method and substrate processing system

Details Substrate processing method and substrate processing system Substrate processing method and substrate processing system

2006-01-31

2006-01-31

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

Automatic controls

C134S0570DL, C134S098100, C134S107000, C134S108000, C134S902000, C438S905000

Reexamination Certificate

active

06990988

ABSTRACT:
A liquid processing system of the present invention controls a temperature of a processing liquid being in a stand-by circulation line by control means for controlling the heaters to heat the processing liquid stored in the tank, while controlling the opening/closing means to pass the cooling medium into the tank with the stored processing liquid.

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