Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate
2005-04-12
2005-04-12
Kornakov, M. (Department: 1746)
Cleaning and liquid contact with solids
Processes
With treating fluid motion
C134S042000, C134S026000, C137S334000
Reexamination Certificate
active
06878216
ABSTRACT:
The present invention controls a temperature of a processing liquid to be in within an allowable processing temperature range, whereby the processing efficiency and throughputs can be improved, deterioration of the processing liquid is prevented, and the life of the processing liquid can be extended.In the liquid processing method, a chemical liquid L stored in a tank10can have temperatures controlled by heating and cooling by a heater1and cooling means2and is circulated for stand-by. the chemical liquid L in the stand-by circulation is supplied to wafers loaded in a processing chamber6to process the wafers, a cooling medium of the cooling means2is heat-exchanged with the chemical liquid L in the tank10to be ready for the next stand-by circulation.
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Kornakov M.
Morrison & Foerster / LLP
Tokyo Electron Limited
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