Substrate processing method and substrate processing apparatus

Details Substrate processing method and substrate processing apparatus Substrate processing method and substrate processing apparatus

2006-03-21

2006-03-21

Nguyen, George (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Controlling temperature

C451S053000, C451S168000, C451S303000

Reexamination Certificate

active

07014529

ABSTRACT:
A substrate processing apparatus polishes a to-be-polished portion of a semiconductor substrate with a polishing tape. Part of the polishing tape is heated in advance. Part of the polishing tape is deformed conforming to a shape of the to-be-polished portion. Part of the deformed polishing tape is brought into contact with the to-be-polished portion of the substrate. The substrate and polishing tape are moved relative to each other.

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