Substrate processing device

Details Substrate processing device Substrate processing device

2007-02-20

2007-02-20

Pelham, Joseph (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S390000, C392S400000, C134S902000

Reexamination Certificate

active

10519126

ABSTRACT:
A steam generator40′ provided in a substrate processing apparatus includes a tank301having a hollow cylindrical member302formed of a composite of PTFE and PFA and a pair of side wall plates303connected to the opposite ends of the cylindrical member302.The tank301is surrounded by a shell305of an aluminum alloy to prevent deformation of the tank due to internal pressure of the tank. A heater308is attached to the outer surfaces of the plate members307of the shell305.The shell305restrains the tank301and compresses elastic sealing members305to sealingly engage the cylindrical member302and the side wall plate303with each other.

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