Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
1999-07-28
2001-11-20
Werner, Frank E. (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S416080, C414S940000, C414S939000, C414S416030, C118S719000
Reexamination Certificate
active
06318945
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to processing of substrate and, more particularly, to an assembly of a vertically arranged load lock and substrate transport robot assembly.
2. Prior Art
U.S. Pat. Nos. 5,562,383 and 5,882,413 disclose different types of substrate processing apparatus. It is known in the art to provide a substrate transport robot between a station holding a cassette of substrates and a load lock into a main transfer chamber of the substrate processing apparatus. A problem with this type of arrangement is that the footprint is relatively large because the cassette holding station, substrate transport robot and load lock are arranged in series along a horizontal plane.
SUMMARY OF THE INVENTION
In accordance with one embodiment of the present invention a substrate processing apparatus substrate transport and load lock assembly is provided comprising a first load lock, a first substrate elevator, and a transport robot. The first substrate elevator has a first vertical drive and a first substrate support connected to the vertical drive. The support is vertically movable by the vertical drive along a path including a first position outside of the load lock and a second position inside the load lock. The transport robot has a movable arm for supporting at least one substrate thereon. The movable arm is movable into and out of the path of the substrate support while the support is located in the load lock.
In accordance with another embodiment of the present invention a substrate processing apparatus substrate transport and load lock assembly is provided comprising a frame, a substrate elevator, and a transport. The frame has a first load lock chamber and a substrate pod receiving chamber vertically orientated relative to each other. The substrate elevator has a vertical drive and a first substrate support connected to the vertical drive. The support is vertically movable by the vertical drive between a position inside the first load lock chamber and a position inside the substrate pod receiving chamber. The transport has a movable arm for supporting a portable substrate pod thereon and for moving a portable substrate pod into and out of the substrate pod receiving chamber to transfer substrates between the substrate pod and the substrate support.
In accordance with another embodiment of the present invention a substrate processing apparatus substrate transport and load lock assembly is provided comprising a frame, a first substrate elevator, and a substrate transport robot. The frame has a first load lock chamber and a substrate transport robot chamber vertically orientated one above the other. The first substrate elevator has a vertical drive and a first substrate support connected to the vertical drive. The support is vertically movable by the vertical drive between a position inside the load lock chamber and a position inside the substrate transport robot chamber. The substrate transport robot has a movable arm assembly and an end effector connected to the movable arm assembly. The end effector is sized and shaped to support at least one substrate thereon. The movable arm assembly is located in the substrate transfer robot chamber. When the substrate support is located in the load lock chamber the movable arm assembly is movable in an area of the substrate transport robot chamber vertically offset and aligned, at least partially, with the substrate support.
In accordance with one method of the present invention a method of transporting substrates between a first load lock chamber and a portable substrate container is provided comprising steps of moving the substrates from the portable substrate container to a first substrate elevator. The substrate elevator having a first substrate support for directly individually supporting the substrates thereon, the substrate support being located in a receiving chamber vertically aligned with the load lock; and moving the substrate elevator to vertically move the substrate support from the receiving chamber into the load lock chamber, wherein the portable substrate container is directly connected to the receiving chamber while the substrates are moved from the container to the substrate elevator.
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Brooks Automation Inc.
Perman & Green LLP
Werner Frank E.
LandOfFree
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