Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1998-03-27
2000-05-09
Morse, Gregory A.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414437, 414439, 41433118, B65G 110
Patent
active
060595078
ABSTRACT:
A substrate load lock comprising a frame and a substrate support movably mounted to the frame. The frame forms at least three chambers. The substrate support has at least two separate support areas. The first one of the support areas is movable between the first one of the chambers. A second one of the support areas is movable between the second chamber and a third one of the chambers.
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Brooks Automation Inc.
Morse Gregory A.
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