Substrate processing apparatus with removable component module

Details Substrate processing apparatus with removable component module Substrate processing apparatus with removable component module

2005-06-15

2009-10-27

Keenan, James (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S935000

Reexamination Certificate

active

07607879

ABSTRACT:
A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.

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