Electricity: motive power systems – Positional servo systems – Program- or pattern-controlled systems
Reexamination Certificate
2011-08-30
2011-08-30
Ip, Paul (Department: 2837)
Electricity: motive power systems
Positional servo systems
Program- or pattern-controlled systems
C318S560000, C318S561000, C451S066000
Reexamination Certificate
active
08008884
ABSTRACT:
A substrate transport apparatus including a peripheral wall having an inner surface that defines a substrate transport chamber capable of holding an isolated atmosphere, at least one substantially ring shaped motor having at least one stator module located within the peripheral wall, between the inner surface and an adjacent outer surface of the peripheral wall and at least one rotor suspended substantially without contact within the transport chamber such that a surface of the peripheral wall encompassed by the ring shaped motor is configured for attachment thereto of a predetermined device and at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.
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Hofmeister Christopher
Krupyshev Alexander G.
Brooks Automation Inc.
Ip Paul
Perman & Green LLP
Pickreign Richard
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