Substrate processing apparatus, operation method thereof and...

Details Substrate processing apparatus, operation method thereof and... Substrate processing apparatus, operation method thereof and...

2005-08-30

2005-08-30

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S117000, C438S005000

Reexamination Certificate

active

06937917

ABSTRACT:
Provided is a substrate processing apparatus that can reduce power consumption, while maintaining throughput. In addition to a normal mode in which all units are activated, the apparatus is provided with an energy saving mode that is selectable. When the energy saving mode is selected, only essential units that are requisites for a substrate processing are activated and used in the substrate processing. If it is necessary to increase process efficiency, any additional unit may be activated and used in the processing. During standby, only an essential unit can be activated and the rest is halted, or alternatively, all units may be halted. The transition to the energy saving mode can occur when the standby state continues for a predetermined period of time after the normal mode is selected.

REFERENCES:
patent: 6134482 (2000-10-01), Iwasaki
patent: 6275740 (2001-08-01), Smith et al.
patent: 6292708 (2001-09-01), Allen et al.
patent: 6801827 (2004-10-01), Yoshitake et al.
patent: 2003/0023340 (2003-01-01), Kitamoto et al.
patent: 2003/0033046 (2003-02-01), Yoshitake et al.
patent: 2003/0171837 (2003-09-01), Yamazaki et al.
patent: 10-322906 (1998-04-01), None
English translation of Abstract for Japanese Patent Application Laid-Open No. 10-322906 dated Apr. 12, 1998.

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