Substrate processing apparatus having regulated power consumptio

Details Substrate processing apparatus having regulated power consumptio Substrate processing apparatus having regulated power consumptio

1998-03-13

2000-05-09

Paschall, Mark

Electric heating

Heating devices

With power supply and voltage or current regulation or...

219485, 219501, 219497, 307 38, 392416, H05B 102

Patent

active

060606975

ABSTRACT:
A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.

REFERENCES:
patent: 4180721 (1979-12-01), Watanabe et al.
patent: 4282422 (1981-08-01), Payne et al.
patent: 4920252 (1990-04-01), Yoshino
patent: 5021637 (1991-06-01), Perala et al.
patent: 5359178 (1994-10-01), Kotani et al.
patent: 5528016 (1996-06-01), Mogi

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