Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate
2011-05-03
2011-05-03
MacArthur, Sylvia R. (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
For liquid etchant
C156S345150, C134S902000, C134S113000
Reexamination Certificate
active
07935217
ABSTRACT:
A bevel unit comprises CCDs and processing liquid nozzles, and the CCDs take an image of a circumferential edge surface of a substrate. An image processing part detects the distances between the circumferential edge surface of the substrate and the processing liquid nozzles by image processing the signals from the CCDs. A control unit compares thus detected distances between the circumferential edge surface of the substrate and the processing liquid nozzles with set distances from the circumferential edge surface of the substrate to the processing liquid nozzles which are set in a recipe so as to be a desired rim etching width, and calculates an amount of displacement between the detected distances and the set distances. In accordance with the amount of displacement, the control unit activates motors and accordingly positions the bevel unit.
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Notification of Reasons for Refusal issued Dec. 22, 2009 in connection with corresponding Japanese Patent Application No. JP2005-045446.
Fukatsu Eiji
Yashiki Hiroyuki
Dainippon Screen Mfg. Co,. Ltd.
MacArthur Sylvia R.
Ostrolenk Faber LLP
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