Substrate processing apparatus for processing substrates...

Details Substrate processing apparatus for processing substrates... Substrate processing apparatus for processing substrates...

2006-04-25

2006-04-25

Carrillo, Sharidan (Department: 1746)

Agitating

By vibration

C134S001300, C134S002000, C134S010000, C134S025400, C134S025500, C134S034000, C134S036000, C134S042000, C134S902000, C366S116000, C366S127000

Reexamination Certificate

active

07033068

ABSTRACT:
Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.

REFERENCES:
patent: 4543130 (1985-09-01), Shwartzman
patent: 6100474 (2000-08-01), McGregor et al.
patent: 6106474 (2000-08-01), Koger et al.
patent: 2002/0096578 (2002-07-01), Al-Jiboory
patent: 2003/0062071 (2003-04-01), Sorbo et al.

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