Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate
2005-04-19
2005-04-19
Carrillo, Sharidan (Department: 1746)
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
C134S002000, C134S010000, C134S025400, C134S025500, C134S034000, C134S036000, C134S042000, C134S902000
Reexamination Certificate
active
06880560
ABSTRACT:
Embodiments of the invention are directed to substrate processing apparatuses and methods for processing substrates. In one embodiment, a substrate processing apparatus includes a processing chamber, a substrate holder inside of the processing chamber for holding a substrate, and a sonic box in the processing chamber for supplying sonic waves substantially perpendicularly to the substrate. The sonic box may comprises a membrane, and a transducer coupled to the membrane.
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Ching Gil
Fresquet Gilles
Perrut Vincent
Ruch Vincent
Carrillo Sharidan
Recif, Inc.
Techsonic
LandOfFree
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