Substrate processing apparatus for inspecting processing...

Details Substrate processing apparatus for inspecting processing... Substrate processing apparatus for inspecting processing...

2006-10-31

2006-10-31

Rutledge, D. (Department: 2851)

Photography

Fluid-treating apparatus

Fluid application to one side only of photographic medium

C700S108000, C700S110000

Reexamination Certificate

active

07128481

ABSTRACT:
During a series of processes performed on a substrate in a substrate processing apparatus, processing history data containing items such as transport time, processing time, plate temperature, revolution per minute of spin motors and flow rate of solutions is obtained for each substrate. When a substrate with a process defect is detected in an inspection block, the processing history data on that substrate is compared with reference data. A processing unit or transport robot in which processing history data falls outside a predetermined range set as the reference data is judged as abnormal, whereby a defective processing unit or defective transport robot is identified. Thus provided is a substrate processing apparatus capable of identifying a defective processing unit or defective transport robot quickly and accurately.

REFERENCES:
patent: 6701204 (2004-03-01), Nicholson
patent: 6841403 (2005-01-01), Tanaka et al.
patent: 2002-280278 (2002-09-01), None
patent: 2002-343694 (2002-11-01), None

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