Substrate processing apparatus control system and substrate...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S110000

Reexamination Certificate

active

06963789

ABSTRACT:
A controller is connected to a substrate processing apparatus and an exposure apparatus. A pilot substrate subjected to a series of processing as preprocessing is transported to an inspection unit. An inspection result determination part compares inspection results received from the inspection unit with substrate condition data so that a condition change instruction part changes the processing condition of each processing unit when no requirement is satisfied. This operation is so repeated that a processing control part executes actual processing according to recipe data when the inspection results satisfy the requirement. Thus, the efficiency a step of changing the processing condition of each processing part in response to the inspection results in the inspection part is improved in preprocessing executed in the substrate processing apparatus.

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English-language translation of Taiwanese Office Action mailed Feb. 4, 2004.
Untranslated letter from Korean Associate enclosing Office Action issued by Korean Patent Office on Nov. 23, 2004 in connection with corresponding application No. 10-2002-0056764.
Korean and Japanese language versions of Korean Office Action dated Nov. 23, 2004 issued in connection with corresponding application No. 10-2002-0056764.

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