Substrate processing apparatus comprising ring-shaped motor

Details Substrate processing apparatus comprising ring-shaped motor Substrate processing apparatus comprising ring-shaped motor

2006-07-11

2006-07-11

Perrin, Joseph L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S902000

Reexamination Certificate

active

07073521

ABSTRACT:
In a substrate processing apparatus for performing a substrate processing with a substrate being rotated, a ring-shaped motor is provided and a water pipe, a drainpipe and gas supply pipes are connected to a stationary part of the motor covered with a rotating part thereof. A gas from the gas supply pipes is supplied between the stationary part and the rotating part of the motor, thereby making the rotating part rotatable with a mechanism of a static pressure gaseous bearing (and a mechanical rotary). A group of induction coils are provided in a ring shape, and the water pipe and the drainpipe are connected to a duct for cooling water formed in the stationary part along the group of induction coils. This constitution allows removal of heat generated by the group of induction coils, to thereby achieving an adequate high-speed rotation of the substrate.

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Japanese Office Action issued Aug. 5, 2005.

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