Substrate processing apparatus and thermal type flowmeter...

Measuring and testing – Volume or rate of flow – Proportional

Reexamination Certificate

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Reexamination Certificate

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10844753

ABSTRACT:
In a thermal type flowmeter60, a heating/heat-sensitive coil64which is shaped as a coil is fit close into an approximately central portion of a duct pipe63. A flow rate computing circuit65supplies electric power to the heating/heat-sensitive coil64in accordance with an instruction received from a control portion, the heating/heat-sensitive coil64develops heat, and the heat developing at the heating/heat-sensitive coil64heats up a hole transporting material8which flows through the duct pipe63. Further, the flow rate computing circuit65which is electrically connected with the heating/heat-sensitive coil64detects a difference between an upstream-side temperature and a downstream-side temperature, and calculates the flow rate (mass flow rate) of the hole transporting material8based on this temperature difference, the amount of heating, physical properties data such as the specific heat and the heat capacity regarding the hole transporting material8.

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