Cleaning and liquid contact with solids – Apparatus – Automatic controls
Reexamination Certificate
2008-07-01
2008-07-01
Markoff, Alexander (Department: 1792)
Cleaning and liquid contact with solids
Apparatus
Automatic controls
C134S061000, C134S082000, C134S902000
Reexamination Certificate
active
10688342
ABSTRACT:
The invention provides a substrate processing apparatus including a processing tank for processing substrates, a transporting path provided along the processing tank, a substrate transporting device moving along the transporting path for transporting the substrates, wherein the substrate processing apparatus and the substrate transporting device mounted thereto may realize the improvement of the throughput of substrate processing without increasing the area for installing the substrate processing apparatus. There are provided at least two substrate transporting devices that are capable of moving on the identical transporting path. The movable ranges of the respective substrate transporting devices for transporting the substrates are overlapped with respect to each other. When transportation of the substrates is required simultaneously at a plurality of processing tanks in scheduling data prepared by a scheduler, the scheduling data is determined by referencing substrate transportation sharing conditions.
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Fukui Akira
Itakura Junichi
Kyoya Naoki
Ohshimo Tsutomu
Frishauf Holtz Goodman & Chick P.C.
Kaijo Corporation
Markoff Alexander
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