Substrate processing apparatus and substrate processing method

Details Substrate processing apparatus and substrate processing method Substrate processing apparatus and substrate processing method

2008-07-08

2008-07-08

Rodriguez, Saul J. (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

C414S217000, C414S222050, C414S222060, C414S937000, C414S941000

Reexamination Certificate

active

10329667

ABSTRACT:
A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to be placed. This apparatus is provided with: a first unit group disposed along a linear first line; a second unit group disposed along a linear second line crossing the first line at a predetermined angle; and a transfer robot capable of transferring and receiving a substrate to and from the first unit group and the second unit group.

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Japanese Office Action issued Nov. 21, 2006.
Japanese Office Action issued Jul. 17, 2007.

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