Substrate processing apparatus and substrate processing method

Details Substrate processing apparatus and substrate processing method Substrate processing apparatus and substrate processing method

2007-06-26

2007-06-26

Lamb, Brenda A. (Department: 1734)

Coating apparatus

Immersion or work-confined pool type

With means for moving work through, into or out of pool

C118S429000

Reexamination Certificate

active

10458184

ABSTRACT:
The present invention relates to a substrate processing apparatus and a substrate processing method suitable for processing a substrate with a plurality of liquids. A substrate processing apparatus comprises a substrate holding device for holding a substrate, a container having an opening portion disposed so that the opening portion is opposed to a surface, to be processed, of the substrate, a driving device for moving the container or the substrate holding device between a position at which the container approaches the substrate or a position at which the substrate enters the container, and a position at which the container is positioned away from the substrate, a first treatment liquid supply device for bringing the surface, to be processed, of the substrate which has approached or entered the container into a first treatment liquid, a covering member for covering the opening portion of the container at the position at which the container is positioned away from the substrate, and a second treatment liquid supply device for bringing the surface, to be processed, of the substrate into a second treatment liquid in a state in which the opening portion of the container is covered with the covering member.

REFERENCES:
patent: 4053383 (1977-10-01), Dötzer et al.
patent: 4066515 (1978-01-01), Stoger et al.
patent: 5930549 (1999-07-01), Kim et al.
patent: 6352623 (2002-03-01), Volodarsky et al.

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