Substrate processing apparatus and substrate processing method

Details Substrate processing apparatus and substrate processing method Substrate processing apparatus and substrate processing method

2007-03-13

2007-03-13

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S121000, C414S935000

Reexamination Certificate

active

11028316

ABSTRACT:
A substrate processing apparatus having a recipe storage section, a transfer control section and a transfer schedule changing section which, when delivery of an n-th substrate from a transfer art to the previous module is delayed by “m” cycles, changes a transfer schedule so as to move each of n-th and subsequent substrates (including the n-th substrate) in the transfer schedule to a module to which an “m”-th substrate following the substrate has been allocated, and transferring the changed transfer schedule data to the transfer control section.

REFERENCES:
patent: 6507770 (2003-01-01), Tateyama et al.
patent: 6640148 (2003-10-01), Miller et al.
patent: 2004/0078109 (2004-04-01), Babikian et al.
patent: 2001-351848 (2001-12-01), None
U.S. Appl. No. 11/028,315, filed Jan. 4, 2005, Higashi et al.
U.S. Appl. No. 11/028,316, filed Jan. 4, 2005, Higashi et al.

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