Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2009-08-26
2011-12-13
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100
Reexamination Certificate
active
08076615
ABSTRACT:
A substrate processing apparatus comprises: an outer tube; a manifold connected to the outer tube and made of a non-metal material; an inner tube disposed in the manifold at a more inner side than the outer tube and configured to process a substrate therein; a heating device installed at a more outer side than the outer tube and configured to heat the inside of the outer tube; a lid configured to open and close an opening of the manifold, with a seal member intervened therebetween; and a heat absorption member installed in the manifold, with a bottom end of the inner tube intervened therebetween, and configured to absorb heat from the heating device, the heat absorption member being made of a non-metal material.
REFERENCES:
patent: 6482753 (2002-11-01), Tometsuka
patent: 8-124869 (1996-05-01), None
patent: 2000-26973 (2000-01-01), None
patent: 2002-334868 (2002-11-01), None
patent: 2002-353145 (2002-12-01), None
Matsuda Tomoyuki
Morita Shinya
Nakada Takayuki
Sada Koichi
Brundidge & Stanger, P.C.
Fuqua Shawntina
Hitachi Kokusai Electric Inc.
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