Substrate processing apparatus and method including obstacle...

Details Substrate processing apparatus and method including obstacle... Substrate processing apparatus and method including obstacle...

2007-06-12

2007-06-12

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S059000, C700S255000, C414S935000

Reexamination Certificate

active

11005578

ABSTRACT:
A camera is fixed to a camera fixture extending forward and upward from a rear end of an arm mechanism. The camera picks up the direction of extension of the arm mechanism when the substrate is carried in and out. If a normal still image in a hot plate unit previously recorded and a still image picked up by the camera coincide with each other, a substrate transport robot TR carries in and out the substrate.

REFERENCES:
patent: 6452503 (2002-09-01), Weiss
patent: 6504144 (2003-01-01), Murata
patent: 6565046 (2003-05-01), Uebel
patent: 6779760 (2004-08-01), Chang et al.
patent: 2005/0207616 (2005-09-01), Brad et al.
patent: 05-050880 (1993-03-01), None
patent: 05-143147 (1993-06-01), None
patent: 09-260261 (1997-10-01), None
patent: 10-214768 (1998-08-01), None
patent: 11-329912 (1999-11-01), None
patent: 2000-195924 (2000-07-01), None
patent: 2000-232145 (2000-08-01), None

Affiliated with

Also associated with

Rating

Substrate processing apparatus and method including obstacle... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate processing apparatus and method including obstacle..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing apparatus and method including obstacle... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3808960