Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2005-12-06
2005-12-06
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C414S936000, C700S213000
Reexamination Certificate
active
06973370
ABSTRACT:
A substrate processing apparatus can align a substrate with a high precision and a high speed by monitoring a mark formed on a surface of the substrate; operating an amount of misalignment between the center of the substrate and a rotation center of a substrate support member; determining a presence of the misalignment and adjusting the substrate such that the center of the substrate coincides with the rotation center of the substrate support member.
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Douki Yuichi
Ishimaru Kazutoshi
Ito Kazuhiko
Kinoshita Michio
Ookura Jun
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
Tran Khoi H.
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