Substrate processing apparatus and management method

Details Substrate processing apparatus and management method Substrate processing apparatus and management method

2007-11-06

2007-11-06

Crawford, Gene O. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S213000, C700S112000, C414S935000, C414S936000, C414S217000

Reexamination Certificate

active

10993956

ABSTRACT:
A variety of maintenance work is performed for each of operation units in a substrate processing apparatus. Doors are provided at given positions on sides of an apparatus space, each of which is provided with an interlock switch. An interlock release unit is provided near each of the doors for disabling the function by the interlock switch, and for placing a specific operation unit of the operation units in the apparatus space in an off state, while holding the other operation units in an on state. Re-operation instruction units are provided at given positions on the sides of the apparatus space for placing the specific operation unit in an on state that has been placed in an off state by the manipulation of the interlock release unit.

REFERENCES:
patent: 5769952 (1998-06-01), Komino
patent: 6095741 (2000-08-01), Kroeker et al.
patent: 6267545 (2001-07-01), Mooring et al.
patent: 2001/0024609 (2001-09-01), White et al.
patent: 2002/0070371 (2002-06-01), Kroeker et al.
patent: 2003/0031537 (2003-02-01), Tokunaga
patent: 2000-252345 (2000-09-01), None

Affiliated with

Also associated with

Rating

Substrate processing apparatus and management method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate processing apparatus and management method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing apparatus and management method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3834072