Data processing: generic control systems or specific application – Generic control system – apparatus or process – Sequential or selective
Reexamination Certificate
2006-01-24
2006-01-24
Knight, Anthony (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Sequential or selective
C700S019000, C700S002000, C700S009000, C700S121000
Reexamination Certificate
active
06990380
ABSTRACT:
An object of the present invention is to grasp easily a process history of a target object such as a semiconductor wafer. The processing apparatus of the present invention includes: a processing apparatus body which includes a plurality of process units for executing a prescribed process to a target object, and transport mechanism for transporting said target object between the process units; a first controller for controlling the processing apparatus as a whole; a second controller for controlling the process units; an information storage section for taking in a signal transmitted and received between the first and second controllers; and a host computer for monitoring operation states of the process units. The present invention is extended to a processing system including a plurality of the processing apparatuses connected with a host computer which is further connected with a monitor computer through a communication network.
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Deguchi Yoichi
Ogata Kunie
Uemura Ryouichi
Yoshimoto Yuji
Knight Anthony
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
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