Substrate processing apparatus and carrier adjusting system

Details Substrate processing apparatus and carrier adjusting system Substrate processing apparatus and carrier adjusting system

2007-08-17

2011-11-15

Prakasam, Ramya (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

Reexamination Certificate

active

08060244

ABSTRACT:
An object of the present invention is to perform replacement of parts of a substrate processing apparatus more rapidly than that by the prior art. The present invention is a substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, identification marks being attached to the respective component parts, the apparatus including: a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark; an input unit for inputting an identification mark of a component part to be ordered; and a display unit for displaying the part information in the storage unit corresponding to the inputted identification mark.

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