Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

2006-02-09

2010-02-23

Tadesse, Yewebdar T (Department: 1792)

Coating apparatus

With indicating, testing, inspecting, or measuring means

With means for visual observation

C118S712000, C118S697000, C118S698000, C118S708000, C222S058000, C222S065000

Reexamination Certificate

active

07665415

ABSTRACT:
LEDs in an LED display part are arranged so as to have approximately the same placing form as containers. When a chemical solution in a container is exhausted, a corresponding LED of the LED display part lights up. Prior to an operation of replacing the container, an operator allows a bar code reader to read a bar code of an unused container. A bar code reader collator collates the bar code data of the unused container with the bar code data of a container corresponding to the lighting LED, which is already registered in a data base. When the bar code reader collator judges that the chemical solutions in the both containers are identical, the display of the LED is changed from a lighting-up display to a flashing display. This makes it easy to recognize the disposing position of the empty container to be replaced, thereby effectively preventing incorrect replacement of the container.

REFERENCES:
patent: 5433344 (1995-07-01), Fulton et al.
patent: 6071346 (2000-06-01), Yamauchi et al.
patent: 2005/0052850 (2005-03-01), Dickey et al.
patent: 11-319686 (1999-11-01), None
Descriptive list of art submission prepared by applicant.
Full English translation of Japanese Patent Application Laid-Open No. 11-319686 prepared by Patent Abstracts of Japan on Mar. 24, 2006.

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