Substrate processing apparatus

Semiconductor device manufacturing: process – Miscellaneous

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C414S939000, C414S940000, C257SE21001

Reexamination Certificate

active

07491662

ABSTRACT:
Substrate processing with return processing is carried out efficiently by a substrate processing apparatus that continuously processes a plurality of substrates. The apparatus is equipped with a conveyor chamber constituting a substrate convey space, a plurality of process chambers in which substrate processing is carried out, a substrate conveying device provided in the conveyor chamber having a function of conveying substrates, and a substrate convey control device that controls the process of substrate conveyance by the substrate conveying device so that in a case in which after a substrate is continuously processed by two or more process chambers, the substrate is re-conveyed from the last process chamber to any of the two or more process chambers other than the last and return processing is implemented. In the re-conveyance, the substrate is conveyed to any of the process chambers after being temporarily retracted to a place other than a process chamber.

REFERENCES:
patent: 2004/0005149 (2004-01-01), Sugimoto et al.
patent: 0 272 141 (1988-06-01), None
patent: 2004-15021 (2004-01-01), None
South Korean Patent Office “Notification of Reason for Refusal”, dated Aug. 22, 2007.
Chinese Patent Office “Notification of Reason for Refusal”, dated Sep. 21, 2007.
Chinese Patent Office “Notification of Reason for Refusal”, dated Mar. 14, 2008.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Substrate processing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate processing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate processing apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4132081

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.