Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate
2005-05-12
2009-02-17
Ghyka, Alexander G (Department: 2812)
Semiconductor device manufacturing: process
Miscellaneous
C414S939000, C414S940000, C257SE21001
Reexamination Certificate
active
07491662
ABSTRACT:
Substrate processing with return processing is carried out efficiently by a substrate processing apparatus that continuously processes a plurality of substrates. The apparatus is equipped with a conveyor chamber constituting a substrate convey space, a plurality of process chambers in which substrate processing is carried out, a substrate conveying device provided in the conveyor chamber having a function of conveying substrates, and a substrate convey control device that controls the process of substrate conveyance by the substrate conveying device so that in a case in which after a substrate is continuously processed by two or more process chambers, the substrate is re-conveyed from the last process chamber to any of the two or more process chambers other than the last and return processing is implemented. In the re-conveyance, the substrate is conveyed to any of the process chambers after being temporarily retracted to a place other than a process chamber.
REFERENCES:
patent: 2004/0005149 (2004-01-01), Sugimoto et al.
patent: 0 272 141 (1988-06-01), None
patent: 2004-15021 (2004-01-01), None
South Korean Patent Office “Notification of Reason for Refusal”, dated Aug. 22, 2007.
Chinese Patent Office “Notification of Reason for Refusal”, dated Sep. 21, 2007.
Chinese Patent Office “Notification of Reason for Refusal”, dated Mar. 14, 2008.
Ghyka Alexander G
Hitachi Kokusai Electric Inc.
Wenderoth , Lind & Ponack, L.L.P.
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