Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

2005-07-27

2009-06-23

Stinson, Frankie L (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

C134S140000, C134S902000

Reexamination Certificate

active

07549428

ABSTRACT:
A substrate processing apparatus includes a photosensor for detecting the presence/absence of a substrate in each place within a carrier cassette, a pair of processing tanks for performing the same process at the same time, and a supply mechanism for supplying a processing solution to the processing tanks independently. The number of substrates is detected in accordance with the result of the detection of the photosensor. If the number of substrates detected is not greater than an allowable number for one of the processing tanks, the processing solution is supplied to only the one processing tank to perform the process. This reduces the consumption of the processing solution in a batch process.

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