Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

2003-07-22

2009-08-18

Adams, Gregory W (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S222010, C414S396000, C414S401000, C414S584000, C414S935000, C198S619000, C204S298250

Reexamination Certificate

active

07575406

ABSTRACT:
A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.

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