Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

2006-06-20

2006-06-20

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

Having self cleaning means

C134S104200, C134S110000, C134S111000, C134S902000

Reexamination Certificate

active

07063094

ABSTRACT:
A substrate processing apparatus includes a substrate processing part46for processing a substrate by a processing liquid and a processing-liquid recovery path137allowing of a passage of the processing liquid discharged from the substrate processing part46. The processing-liquid recovery path137is provided with foreign substance removal lines181, 182including filters200, 201for removing an foreign substance from the processing liquid and cleaners201, 211for cleaning the filters200, 201respectively. With this constitution, it is possible to cancel the blocking of foreign substances in pipes etc. and also possible to lengthen the life span of the filters.

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