Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

2005-05-24

2005-05-24

Keenan, James W. (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

Transporting means is a horizontally rotated arm

C414S222130, C414S283000, C414S939000

Reexamination Certificate

active

06896466

ABSTRACT:
A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopially nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member (48) upwardly to simultaneously elevate a vertical movement member (42d). As the vertical movement member (42d) rises, a pulley (47c) simultaneously moves upwardly. As the pulley (47c) moves upwardly, a vertical movement member (42c) is lifted upwardly by a belt (L1). Similar actions elevate a pair of transport arms (31a, 31b) provided on the top of a vertical movement member (42a). The increase in the number of tiers of the nestable multi-tier structure precludes the increase in height of the transport robot (TR1) in its retracted position. The substrate processing apparatus, if having an increased height, is capable of transporting a substrate to and from processing portions and eliminates the need to reassemble and adjust the transport robot (TR1) for transportation of the apparatus.

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Japanese Office Action and List of References.
Untranslated Japanese Office Action issued in connection with a corresponding Japanese application dated Nov. 18, 2003.
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