Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate
2011-01-04
2011-01-04
MacArthur, Sylvia R. (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
For liquid etchant
C156S345170, C134S198000
Reexamination Certificate
active
07862680
ABSTRACT:
A substrate processing apparatus is provided. The apparatus includes a plurality of fluid suppliers61, 61, 63for supplying different processing fluids. In processing a wafer W, the substrate processing apparatus moves the fluid suppliers61, 62, 63along the peripheral part of the wafer W relatively. The fluid suppliers61, 62, 63are arranged in a direction extending from the circumference of the wafer W to its inside. With the arrangement, the apparatus is capable of stable processing of the wafer W in spite of rotating the wafer W at a low speed. Further, it is possible to improve a throughput of the apparatus in resist processing.
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Kuroda Osamu
Nishida Tatsuya
Orii Takehiko
MacArthur Sylvia R.
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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