Conveyors: power-driven – Conveyor for changing attitude of item relative to conveyed... – By actuating item-holder relative to holder-carrying conveyor
Patent
1985-10-22
1987-06-23
Spar, Robert J.
Conveyors: power-driven
Conveyor for changing attitude of item relative to conveyed...
By actuating item-holder relative to holder-carrying conveyor
198344, 1984741, 1984781, 414225, 118503, B65G 2900
Patent
active
046746218
ABSTRACT:
An apparatus for automatically sequentially processing a large number of substrates. A plurality of substrate processing stages are arranged around a single imaginary circle, and a substrate attaching/detaching stage has its center as one position on the single imaginary circle. A conveyor transports substrates to or from the substrate attaching/detaching stage. A substrate holder receives each substrate from the conveyor and transfers each substrate to the conveyor after processing. The holder includes a mechanism for changing the attitude of a substrate from horizontal to vertical, for conveying the substrate in the vertical attitude to the processing stages, and for changing the attitude of a processed substrate from vertical to horizontal. A revolving mechanism sequentially conveys the holder in the vertical attitude from the attaching/detaching stage to each processing stage and returns the holder to the substrate attaching/detaching stage. The revolving mechanism has a ring arranged such that a periphery thereof is aligned with the single imaginary circle and is intermittently rotated in one horizontal direction.
REFERENCES:
patent: 3842973 (1974-10-01), Rothert
patent: 4030622 (1977-06-01), Brooks et al.
patent: 4092952 (1978-06-01), Wilkie et al.
patent: 4405435 (1983-09-01), Tateishi et al.
patent: 4408560 (1983-10-01), Caratsch
patent: 4465416 (1984-08-01), Burkhalter et al.
patent: 4502411 (1985-03-01), Gilbride et al.
patent: 4582191 (1986-04-01), Weigand
Anelva Corporation
Holmes Jonathan D.
Spar Robert J.
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