Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

2011-01-25

2011-01-25

Lowe, Michael S (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S222120, C414S939000

Reexamination Certificate

active

07874781

ABSTRACT:
A substrate processing apparatus includes a plurality of process chambers (20) for applying a process to substrate accommodated therein and a conveyance case (24) that conveys the accommodated substrates to the process chambers (20) and a transfer mechanism that moves the conveyance case (24) along a moving path. The conveyance case accommodates the substrates in an isolated state from an external atmosphere. The plurality of process chambers (20) are arranged in an aligned state on both sides of a moving path of the conveyance case (24). The conveyance case (24) has two conveyance ports (24a) in response to conveyance ports (20a) of the process chambers (20) arranged in alignment in two rows.

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International Search Report (Nine (9) pages) dated Nov. 30, 2004 including English Translation.

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