Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

1997-10-24

1999-08-31

Graham, Gary K.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 882, 15 883, 15102, A46B 1302

Patent

active

059437260

ABSTRACT:
A substrate processing apparatus adapted to properly perform a substrate scrubbing process with the use of a scrubbing member. The apparatus includes a retention member for retaining a scrubbing member for scrubbing a substrate and a vertical drive mechanism for vertically moving the retention member. The state of the scrubbing member and the vertical position of the retention member are sensed, and a vertical position of the retention member suitable for the scrubbing of the substrate is determined on the basis of the results of the sensing. Then, the retention member is moved to the position thus determined.

REFERENCES:
patent: 4993097 (1991-02-01), D'Amato
patent: 5475889 (1995-12-01), Thrasher et al.
patent: 5675856 (1997-10-01), Itzkowitz
patent: 5685039 (1997-11-01), Homada et al.
patent: 5860178 (1999-01-01), Nishimura et al.
patent: 5860181 (1999-01-01), Maekawa et al.

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