Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

1996-12-23

1999-12-28

Simmons, David A.

Coating apparatus

With treatment of coating material

118665, 118667, B05C 1110

Patent

active

060076291

ABSTRACT:
A chemical supplied onto a substrate is contained in a chemical container. A chemical cooling unit keeps the chemical contained in the chemical container cooled to a proper temperature for storage. A chemical pressure-transferring portion causes the chemical to flow from the chemical container into a chemical introducing pipe. A chemical temperature controller portion changes the temperature of the chemical guided by the chemical introducing pipe to a proper temperature for application on a substrate. The chemical brought to the proper application temperature is guided to a chemical dispensing unit, which dispenses the chemical onto a substrate.

REFERENCES:
patent: 4413255 (1983-11-01), Cohen et al.
patent: 4886012 (1989-12-01), Ikeno et al.
patent: 4932553 (1990-06-01), Kawata et al.
patent: 5035200 (1991-07-01), Moriyama et al.
patent: 5374312 (1994-12-01), Hasebe et al.

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